KLA's comprehensive portfolio of defect inspection, metrology, software, and wafer processing solutions support MEMS manufacturing and R&D. Alongside their advanced metrology and inspection technologies, KLA also offers Si DRIE for silicon micromachining, MEMS release etch processes using HF or XeF2 vapor, low temperature PECVD, molecular vapor deposition (MVD®) and PVD of metals and AlScN for piezoMEMS or RF applications.